AJA Thermal Evaporator¶

Safety Information and Overview¶

Section 1 – Process or Experiment Description¶

This SOP is only for the general use of depositing thin films. Only approved users are allowed to use the equipment, after passing a qualification with the tool manager. Any maintenance will be done by trained staff members. Some maintenance creates additional hazards which will be described in the Instrument Manual.

*Note: Any sample preparation is to be done by the user, and this document does not cover any information related to sample preparation. Any materials listed outside of the approved list, must be discussed with the tool manager. NO high vapor pressure materials

Section 2 – Hazardous Substances¶

Substance Name: Chromium

Common Name: Chrome

Abbreviation: Cr

Substance Name: Silver

Abbreviation: Ag

Section 3 – Potential Hazards¶

Hazard	Hazard Sign	Hazard Description
Bright light		Serious eye damage may occur if viewed directly at light during use
Electric Shock		The tool operates in extremely high voltages (3-10kV).
Thermal		Sample(s) and sample plate can get hot to touch
Chrome		Exposure to particulate or vapor form may present significant health hazards and is toxic to aquatic organisms. Under the high temperatures involved in e-beam evaporation, metallic Cr can oxidize into Cr(VI), especially in the presence of residual oxygen. This is highly toxic to aquatic organisms and is a known human carcinogen.
Silver		Silver is toxic to aquatic life in nanoparticulate or ionic forms. low acute toxicity, but chronic exposure (especially to nanoparticles or silver dust) may lead to: Argyria: A bluish-gray discoloration of the skin.
Respiratory irritation from dust or vapor in poorly ventilated areas.

Section 4 – Routes of Exposure¶

Eye damage can occur if looking through the viewport window with the shutter open, and not wearing the appropriate protective eyewear.

Electric shock can occur when working with the high voltage feedthroughs or in the back of the electronics rack, without properly grounding the work area beforehand.

Thermal hazard is present if using the e-beam evaporator for a long period of time, which can heat up the plate and the sample(s).

Inhalation hazard is present if did not wait until the tool has vented fully to the atmosphere.

Section 5 – Personal Protective Equipment¶

All personnel must wear the welding goggles whenever looking directly at the bright e-beam.

All trained staff must use the grounding rod to touch the working areas, before attempting any maintenance.

Section 6 – Waste Disposal¶

Kapton or copper tape that has silver and/or chrome on the top layer, must be disposed into the container found on the workbench. Staff will transport the container for waste disposal when the container is full.

Tool operation¶

Coming soon!¶

Common Errors and Troubleshooting¶

Prepared by: Salam Elhalabi
Date: June 4, 2025
Reviewed/Revised:
Salam Elhalabi